Supported Wafer Types
- Silicon (Si), Silicon-on-insulator (SOI)
- Compound semiconductors (GaAs, SiC, GaN, InP)
- Sapphire, fused silica, quartz, Pyrex glass
- MEMS substrates, CMOS wafers
- Metalized wafers, bumped wafers, TSV wafers
Diameter Ranges
- 2" (50 mm), 3" (75 mm), 4" (100 mm), 5" (125 mm)
- 6" (150 mm), 8" (200 mm), 12" (300 mm)
- Custom square substrates and partial wafers (downsized formats)
Thickness Capabilities
- Original thickness to<30 µm ultra-thin wafers
- Compound wafers down to<50 µm
- Customized thinning for localized back-side removal

