Variable Angle Spectroscopic Ellipsometer

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Note: this service is for Research Use Only and Not intended for clinical use.

Spectroscopic Ellipsometer is widely used for thin film analysis and measurement. It is an accurate and versatile technique for research on semiconductors, dielectrics, polymers, metals, multi-layers, and so on. Variable Angle Spectroscopic Ellipsometer (VASE) uses Rotating Analyzer Ellipsometry technique to characterize thin film samples. And it uses high speed CCD array detection to collect the entire spectrum. It measures films with nanometer thicknesses up to tens of microns and also measures the optical properties of transparent and absorbing materials. It accurately measures optical constants like refractive index, film thickness and extinction coefficient. It combines high accuracy and precision with a wide spectral range from 193 to 2500 nm. Variable wavelengths and angles of incidence allow for flexible measurement capabilities.

Specifications

Specifications - VASE
Ellipsometer configuration	RAE with AutoRetarder
Spectral range	Standard (double chamber), 240-1700 nm VASE+DUV, 193-1700 nm VASE+DUV+XNIR, 193-2500 nm VASE+DUV+XXIR, 193-3200 nm VASE+XNIR, 240-2500 nm VASE+XXIR, 240-3200 nm
Number of wavelengths	User defined before measurement
Angles of incidence	15°-90°
Accuracy	0.01°
Data acquisition rate	0.1 to 3 seconds per wavelength
Max substrate thickness	20 mm

Measurement Capabilities

Reflection and Transmission Ellipsometry
Cross-polarized R/T
Reflectance (R) and Transmittance (T) intensity
Depolarization

Scatterometry
Mueller-matrix
Generalized Ellipsometry (Anisotropy, Retardance, Birefringence)

Features

Maximum Data Accuracy
High Precision Wavelength Selection

Flexible Measurement
AutoRetarder® Technology

Applications

Recommendation
Ordering Process
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