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Tantalum(V) ethoxide

Catalog Number
ACM6074846
Product Name
Tantalum(V) ethoxide
Structure
Tantalum(V) ethoxide
CAS
6074-84-6
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Synonyms
PET,Pentaethoxytantalum,Pentaethyl tantalate,Tantalum pentaethoxide
IUPAC Name
ethanolate;tantalum(5+);
Molecular Weight
406.25
Molecular Formula
Ta(OC2H5)5
InChI
1S/5C2H5O.Ta/c5*1-2-3;/h5*2H2,1H3;/q5*-1;+5,HSXKFDGTKKAEHL-UHFFFAOYSA-N
InChI Key
HSXKFDGTKKAEHL-UHFFFAOYSA-N
Melting Point
21 °C (lit.)
Storage
2-8°C
Complexity
2.8
Covalently-Bonded Unit Count
6
EC Number
228-010-2
Exact Mass
406.118g/mol
H-Bond Acceptor
5
Heavy Atom Count
16
MDL Number
MFCD00049785
Monoisotopic Mass
406.118g/mol
Topological Polar Surface Area
115A^2
Application
Tantalum(V) ethoxide precursor is used to deposit ultra thin films of Tantalum oxide and other tantalum containing films by atomic layer deposition and chemical vapor deposition methods
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